Speech theme:

Safe Emission of Energetic Materials in Panel Production

Speech summary:

Panel production equipment increasingly uses energetic materials (e.g., H₂, SiH₄, Al₂(CH₃)₆). These materials are exhausted by vacuum pumps, compressed, treated harmlessly in tail gas systems, and discharged via central scrubbers. To ensure production safety, SEMI’s SEMI S30 standard guides intelligent control and integrated design for safe emission of energetic materials.